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Reactive Sputter Deposition

Overview of attention for book
Attention for Chapter 7: Energy Deposition at the Substrate in a Magnetron Sputtering System
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Citations

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Chapter title
Energy Deposition at the Substrate in a Magnetron Sputtering System
Chapter number 7
Book title
Reactive Sputter Deposition
Published by
Springer, Berlin, Heidelberg, January 2008
DOI 10.1007/978-3-540-76664-3_7
Book ISBNs
978-3-54-076662-9, 978-3-54-076664-3
Authors

Samuel D. Ekpe, Steven K. Dew

Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 30 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
Netherlands 1 3%
Germany 1 3%
Norway 1 3%
Belgium 1 3%
Unknown 26 87%

Demographic breakdown

Readers by professional status Count As %
Student > Ph. D. Student 9 30%
Researcher 8 27%
Student > Master 6 20%
Student > Doctoral Student 2 7%
Student > Bachelor 2 7%
Other 2 7%
Unknown 1 3%
Readers by discipline Count As %
Materials Science 14 47%
Physics and Astronomy 8 27%
Engineering 5 17%
Chemical Engineering 1 3%
Unknown 2 7%