↓ Skip to main content
What is this page? Embed badge

Reactive Sputter Deposition

Overview of attention for book
Cover of 'Reactive Sputter Deposition'

Table of Contents

  1. Altmetric Badge
    Book Overview
  2. Altmetric Badge
    Chapter 1 Simulation of the Sputtering Process
  3. Altmetric Badge
    Chapter 2 Electron Emission from Surfaces Induced by Slow Ions and Atoms
  4. Altmetric Badge
    Chapter 3 Modeling of the Magnetron Discharge
  5. Altmetric Badge
    Chapter 4 Modelling of Reactive Sputtering Processes
  6. Altmetric Badge
    Chapter 5 Depositing Aluminium Oxide: A Case Study of Reactive Magnetron Sputtering
  7. Altmetric Badge
    Chapter 6 Transport of Sputtered Particles Through the Gas Phase
  8. Altmetric Badge
    Chapter 7 Energy Deposition at the Substrate in a Magnetron Sputtering System
  9. Altmetric Badge
    Chapter 8 Process Diagnostics
  10. Altmetric Badge
    Chapter 9 Optical Plasma Diagnostics During Reactive Magnetron Sputtering
  11. Altmetric Badge
    Chapter 10 Reactive Magnetron Sputtering of Indium Tin Oxide Thin Films: The Cross-Corner and Cross-Magnetron Effect
  12. Altmetric Badge
    Chapter 11 Reactively Sputter-Deposited Solid Electrolytes and Their Applications
  13. Altmetric Badge
    Chapter 12 Reactive SputteredWide-Bandgap p-Type Semiconducting Spinel AB 2 O 4 and Delafossite ABO 2 Thin Films for “Transparent Electronics”
  14. Altmetric Badge
    Chapter 13 Oxide-Based Electrochromic Materials and Devices Prepared by Magnetron Sputtering
  15. Altmetric Badge
    Chapter 14 Atomic Assembly of Magnetoresistive Multilayers
Attention for Chapter 9: Optical Plasma Diagnostics During Reactive Magnetron Sputtering
Altmetric Badge

Citations

dimensions_citation
216 Dimensions

Readers on

mendeley
14 Mendeley
Summary Dimensions citations
So far, Dimensions has found 216 publications that cite this research output.

216

The most recent citing publications are shown below. View all 216 publications that cite this research output on Dimensions.

This page shows the most recent citations of this research output.

Click here to find out how to access more activity.

This page is provided by Altmetric.