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Chapter title |
Study of Effect of Methane Concentration in Argon Plasma on Tantalum Compound Sputtering Deposition Process
|
---|---|
Chapter number | 21 |
Book title |
Nondestructive Characterization of Materials VI
|
Published by |
Springer, Boston, MA, January 1994
|
DOI | 10.1007/978-1-4615-2574-5_21 |
Book ISBNs |
978-1-4613-6100-8, 978-1-4615-2574-5
|
Authors |
S. L. Lee, C. S. Lee, Lee, S. L., Lee, C. S. |