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Chapter title |
Elastic Properties of Thin Film Silicon Nitride by Brillouin Spectroscopy
|
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Chapter number | 35 |
Book title |
Nondestructive Characterization of Materials VI
|
Published by |
Springer, Boston, MA, January 1994
|
DOI | 10.1007/978-1-4615-2574-5_35 |
Book ISBNs |
978-1-4613-6100-8, 978-1-4615-2574-5
|
Authors |
Vahid Askarpour, Murli H. Manghnani, Michael Mendik, Peter Wachter, Askarpour, Vahid, Manghnani, Murli H., Mendik, Michael, Wachter, Peter |