Nanoscribe,
The latest book on recent nano- and microfabrication techniques is now available from Springer. We are very happy that…
Micro and Nano Fabrication
Overview of attention for book
Table of Contents
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Altmetric BadgeBook Overview
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Altmetric BadgeChapter 1 Introduction—MEMS, a Historical Perspective
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Altmetric BadgeChapter 2 Vacuum Technology
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Altmetric BadgeChapter 3 Deposition Technologies
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Altmetric BadgeChapter 4 Etching Technologies
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Altmetric BadgeChapter 5 Doping and Surface Modification
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Altmetric BadgeChapter 6 Lithography
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Altmetric BadgeChapter 7 LIGA
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Altmetric BadgeChapter 8 Nanofabrication by Self-Assembly
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Altmetric BadgeChapter 9 Enabling Technologies I—Wafer Planarization and Bonding
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Altmetric BadgeChapter 10 Enabling Technologies II—Contamination Control
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Altmetric BadgeChapter 11 Device Fabrication—An Example