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Mendeley readers
| Chapter title |
Lithography
|
|---|---|
| Chapter number | 6 |
| Book title |
Micro and Nano Fabrication
|
| Published by |
Springer Berlin Heidelberg, January 2015
|
| DOI | 10.1007/978-3-662-44395-8_6 |
| Book ISBNs |
978-3-66-244394-1, 978-3-66-244395-8
|
| Authors |
Hans H. Gatzen, Volker Saile, Jürg Leuthold, Gatzen, Hans H., Saile, Volker, Leuthold, Jürg |
Mendeley readers
The data shown below were compiled from readership statistics for 1 Mendeley reader of this research output. Click here to see the associated Mendeley record.
Geographical breakdown
| Country | Count | As % |
|---|---|---|
| Unknown | 1 | 100% |
Demographic breakdown
| Readers by professional status | Count | As % |
|---|---|---|
| Student > Bachelor | 1 | 100% |
| Readers by discipline | Count | As % |
|---|---|---|
| Physics and Astronomy | 1 | 100% |