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| Chapter title |
Device Fabrication—An Example
|
|---|---|
| Chapter number | 11 |
| Book title |
Micro and Nano Fabrication
|
| Published by |
Springer, Berlin, Heidelberg, January 2015
|
| DOI | 10.1007/978-3-662-44395-8_11 |
| Book ISBNs |
978-3-66-244394-1, 978-3-66-244395-8
|
| Authors |
Hans H. Gatzen, Volker Saile, Jürg Leuthold, Gatzen, Hans H., Saile, Volker, Leuthold, Jürg |