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Micro and Nano Fabrication

Overview of attention for book
Cover of 'Micro and Nano Fabrication'

Table of Contents

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    Book Overview
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    Chapter 1 Introduction—MEMS, a Historical Perspective
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    Chapter 2 Vacuum Technology
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    Chapter 3 Deposition Technologies
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    Chapter 4 Etching Technologies
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    Chapter 5 Doping and Surface Modification
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    Chapter 6 Lithography
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    Chapter 7 LIGA
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    Chapter 8 Nanofabrication by Self-Assembly
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    Chapter 9 Enabling Technologies I—Wafer Planarization and Bonding
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    Chapter 10 Enabling Technologies II—Contamination Control
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    Chapter 11 Device Fabrication—An Example
Attention for Chapter 1: Introduction—MEMS, a Historical Perspective
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