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Design for Manufacturability and Yield for Nano-Scale CMOS

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Cover of 'Design for Manufacturability and Yield for Nano-Scale CMOS'

Table of Contents

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    Book Overview
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    Chapter 1 Introduction
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    Chapter 2 Random Defects
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    Chapter 3 Systematic Yield - Lithography
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    Chapter 4 Systematic Yield - Chemical Mechanical Polishing (CMP)
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    Chapter 5 Variability & Parametric Yield
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    Chapter 6 Design for Yield
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    Chapter 7 Yield Prediction
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    Chapter 8 Conclusions
Attention for Chapter 5: Variability & Parametric Yield
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Summary
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Chapter title
Variability & Parametric Yield
Chapter number 5
Book title
Design for Manufacturability and Yield for Nano-Scale CMOS
Published by
Springer, Dordrecht, January 2007
DOI 10.1007/978-1-4020-5188-3_5
Book ISBNs
978-1-4020-5187-6, 978-1-4020-5188-3
Authors

Charles C. Chiang, Jamil Kawa, Chiang, Charles C., Kawa, Jamil

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