MEMS and Nanotechnology, Volume 2
Springer New York
Chapter title |
Recent Progress in E-Beam Lithography for SEM Patterning
|
---|---|
Chapter number | 23 |
Book title |
MEMS and Nanotechnology, Volume 2
|
Published by |
Springer, New York, NY, January 2011
|
DOI | 10.1007/978-1-4419-8825-6_23 |
Book ISBNs |
978-1-4419-8824-9, 978-1-4419-8825-6
|
Authors |
Ning Li, Siming Guo, Michael A. Sutton, Li, Ning, Guo, Siming, Sutton, Michael A. |
Country | Count | As % |
---|---|---|
Korea, Republic of | 1 | 11% |
Unknown | 8 | 89% |
Readers by professional status | Count | As % |
---|---|---|
Student > Ph. D. Student | 5 | 56% |
Professor | 1 | 11% |
Student > Doctoral Student | 1 | 11% |
Unknown | 2 | 22% |
Readers by discipline | Count | As % |
---|---|---|
Engineering | 5 | 56% |
Materials Science | 1 | 11% |
Economics, Econometrics and Finance | 1 | 11% |
Unknown | 2 | 22% |