MEMS and Nanotechnology, Volume 2
Springer New York
Chapter title |
Calibrating Force and Displacement in the Face of Property Variation
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Chapter number | 10 |
Book title |
MEMS and Nanotechnology, Volume 2
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Published by |
Springer, New York, NY, January 2011
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DOI | 10.1007/978-1-4419-8825-6_10 |
Book ISBNs |
978-1-4419-8824-9, 978-1-4419-8825-6
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Authors |
Jason V. Clark, Clark, Jason V. |