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Chapter title |
Advances in Thin Film Nanoindentation
|
---|---|
Chapter number | 36 |
Book title |
MEMS and Nanotechnology, Volume 2
|
Published by |
Springer, New York, NY, January 2011
|
DOI | 10.1007/978-1-4419-8825-6_36 |
Book ISBNs |
978-1-4419-8824-9, 978-1-4419-8825-6
|
Authors |
B. Zhou, K. Schwieker, B. C. Prorok, Zhou, B., Schwieker, K., Prorok, B. C. |