MEMS and Nanotechnology, Volume 2
Springer New York
Chapter title |
Micromotor Fabrication by Surface Micromachining Technique.
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Chapter number | 20 |
Book title |
MEMS and Nanotechnology, Volume 2
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Published by |
Springer, New York, NY, January 2011
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DOI | 10.1007/978-1-4419-8825-6_20 |
Book ISBNs |
978-1-4419-8824-9, 978-1-4419-8825-6
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Authors |
Dhananjay Barbade, Rohit Soni, Shriniwas Metan, Barbade, Dhananjay, Soni, Rohit, Metan, Shriniwas |
Country | Count | As % |
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Unknown | 1 | 100% |
Readers by professional status | Count | As % |
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Student > Ph. D. Student | 1 | 100% |
Other | 1 | 100% |
Readers by discipline | Count | As % |
---|---|---|
Engineering | 2 | 200% |