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| Chapter title |
Evolution and Performance of the Nova NV-ID Predep™ Implanter
|
|---|---|
| Chapter number | 12 |
| Book title |
Ion Implantation Techniques
|
| Published by |
Springer, Berlin, Heidelberg, January 1982
|
| DOI | 10.1007/978-3-642-68779-2_12 |
| Book ISBNs |
978-3-64-268781-5, 978-3-64-268779-2
|
| Authors |
G. Ryding, Ryding, G. |