You are seeing a free-to-access but limited selection of the activity Altmetric has collected about this research output.
Click here to find out more.
Chapter title |
The IONMICROPROBE A-DIDA 3000-30 for Dopant Depth Profiling and Impurity Bulk Analysis
|
---|---|
Chapter number | 16 |
Book title |
Ion Implantation Techniques
|
Published by |
Springer, Berlin, Heidelberg, January 1982
|
DOI | 10.1007/978-3-642-68779-2_16 |
Book ISBNs |
978-3-64-268781-5, 978-3-64-268779-2
|
Authors |
J. L. Maul, H. Frenzel, Maul, J. L., Frenzel, H. |