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Chapter title |
Standard High-Voltage Power Supplies for Ion Implantation
|
---|---|
Chapter number | 15 |
Book title |
Ion Implantation Techniques
|
Published by |
Springer, Berlin, Heidelberg, January 1982
|
DOI | 10.1007/978-3-642-68779-2_15 |
Book ISBNs |
978-3-64-268781-5, 978-3-64-268779-2
|
Authors |
M. Baumann, Baumann, M. |