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Ion Implantation Techniques

Overview of attention for book
Attention for Chapter 15: Standard High-Voltage Power Supplies for Ion Implantation
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Chapter title
Standard High-Voltage Power Supplies for Ion Implantation
Chapter number 15
Book title
Ion Implantation Techniques
Published by
Springer, Berlin, Heidelberg, January 1982
DOI 10.1007/978-3-642-68779-2_15
Book ISBNs
978-3-64-268781-5, 978-3-64-268779-2
Authors

M. Baumann, Baumann, M.