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Helium Ion Microscopy

Overview of attention for book
Cover of 'Helium Ion Microscopy'

Table of Contents

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    Book Overview
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    Chapter 1 Introduction to Helium Ion Microscopy
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    Chapter 2 Microscopy with Ions: A Brief History
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    Chapter 3 Operating the Helium Ion Microscope
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    Chapter 4 Ion–Solid Interactions and Image Formation
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    Chapter 5 Charging and Damage
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    Chapter 6 Microanalysis with HIM
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    Chapter 7 Ion-Generated Damage
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    Chapter 8 Working with Other Ion beams
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    Chapter 9 Patterning and Nanofabrication
Attention for Chapter 7: Ion-Generated Damage
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