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| Chapter title |
Ion-Generated Damage
|
|---|---|
| Chapter number | 7 |
| Book title |
Helium Ion Microscopy
|
| Published by |
Springer, New York, NY, January 2013
|
| DOI | 10.1007/978-1-4614-8660-2_7 |
| Book ISBNs |
978-1-4614-8659-6, 978-1-4614-8660-2
|
| Authors |
David C. Joy, Joy, David C. |