Korean 화학기계적 연마 Cited by user Khlee560 on 07 Jun 2024 화학기계적 연마(Chemical-mechanical polishing, CMP) 또는 화학기계적 평탄화는 화학적 힘과 기계적 힘을 결합하여 표면을 매끄럽게 하는 프로세스이다.
French Polissage mécanochimique Cited by user Guillemette Corrieu on 28 May 2024 Le polissage mécanochimique (en anglais, Chemical mechanical polishing ou CMP) est un procédé de polissage des surfaces utilisant l'action combinée de forces mécaniques…
English Chemical-mechanical polishing Cited by user ComputerUserUser on 01 Jan 2024 Chemical mechanical polishing (CMP) or planarization is a process of smoothing surfaces with the combination of chemical and mechanical forces.