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| Chapter title |
Patterned Wafer Effects
|
|---|---|
| Chapter number | 9 |
| Book title |
Chemical-Mechanical Planarization of Semiconductor Materials
|
| Published by |
Springer, Berlin, Heidelberg, January 2004
|
| DOI | 10.1007/978-3-662-06234-0_9 |
| Book ISBNs |
978-3-64-207738-8, 978-3-66-206234-0
|
| Authors |
D. Boning, D. Hetherington, Boning, D., Hetherington, D. |