Development of rigid polishing materials for use in microelectronics
Article in Plasticheskie massy (May 2024)
The most recent citing publications are shown below. View all 170 publications that cite this research output on Dimensions.
Article in Plasticheskie massy (May 2024)
Conference proceeding (March 2024)
Article in Colloids and Surfaces A Physicochemical and Engineering Aspects (October 2023)