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Chapter title |
Doping technology
|
---|---|
Chapter number | 6 |
Book title |
Technology of Integrated Circuits
|
Published by |
Springer, Berlin, Heidelberg, January 2000
|
DOI | 10.1007/978-3-662-04160-4_6 |
Book ISBNs |
978-3-64-208547-5, 978-3-66-204160-4
|
Authors |
Dietrich Widmann, Hermann Mader, Hans Friedrich, Walter Heywang, Rudolf Müller, Widmann, Dietrich, Mader, Hermann, Friedrich, Hans, Heywang, Walter, Müller, Rudolf |