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Technology of Integrated Circuits

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Attention for Chapter 2: Basic principles of integrated circuit technology
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Chapter title
Basic principles of integrated circuit technology
Chapter number 2
Book title
Technology of Integrated Circuits
Published by
Springer, Berlin, Heidelberg, January 2000
DOI 10.1007/978-3-662-04160-4_2
Book ISBNs
978-3-64-208547-5, 978-3-66-204160-4
Authors

Dietrich Widmann, Hermann Mader, Hans Friedrich, Walter Heywang, Rudolf Müller, Widmann, Dietrich, Mader, Hermann, Friedrich, Hans, Heywang, Walter, Müller, Rudolf