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Technology of Integrated Circuits

Overview of attention for book
Attention for Chapter 5: Etching technology
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Chapter title
Etching technology
Chapter number 5
Book title
Technology of Integrated Circuits
Published by
Springer, Berlin, Heidelberg, January 2000
DOI 10.1007/978-3-662-04160-4_5
Book ISBNs
978-3-64-208547-5, 978-3-66-204160-4
Authors

Dietrich Widmann, Hermann Mader, Hans Friedrich, Walter Heywang, Rudolf Müller, Widmann, Dietrich, Mader, Hermann, Friedrich, Hans, Heywang, Walter, Müller, Rudolf

Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 5 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
Unknown 5 100%

Demographic breakdown

Readers by professional status Count As %
Student > Ph. D. Student 2 40%
Professor 1 20%
Researcher 1 20%
Student > Master 1 20%
Readers by discipline Count As %
Engineering 3 60%
Physics and Astronomy 2 40%