↓ Skip to main content
What is this page? Embed badge

Dry Etching Technology for Semiconductors

Overview of attention for book
Cover of 'Dry Etching Technology for Semiconductors'

Table of Contents

  1. Altmetric Badge
    Book Overview
  2. Altmetric Badge
    Chapter 1 The Contribution of Dry Etching Technology to Progress in Semiconductor Integrated Circuits
  3. Altmetric Badge
    Chapter 2 Mechanism of Dry Etching
  4. Altmetric Badge
    Chapter 3 Dry Etching of Various Materials
  5. Altmetric Badge
    Chapter 4 Dry Etching Equipment
  6. Altmetric Badge
    Chapter 5 Dry Etching Damage
  7. Altmetric Badge
    Chapter 6 Latest Dry Etching Technologies
  8. Altmetric Badge
    Chapter 7 Future Challenges and Outlook for Dry Etching Technology
Attention for Chapter 5: Dry Etching Damage
Altmetric Badge

Citations

dimensions_citation
120 Dimensions

Readers on

mendeley
2 Mendeley
Summary Dimensions citations
So far, Dimensions has found 120 publications that cite this research output.

120

The most recent citing publications are shown below. View all 120 publications that cite this research output on Dimensions.

This page shows the most recent citations of this research output.

Click here to find out how to access more activity.

This page is provided by Altmetric.