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Dry Etching Technology for Semiconductors

Overview of attention for book
Overall attention for this book and its chapters
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Mentioned by

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1 X user
patent
2 patents

Citations

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115 Dimensions

Readers on

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310 Mendeley
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Title
Dry Etching Technology for Semiconductors
Published by
Springer International Publishing, October 2014
DOI 10.1007/978-3-319-10295-5
ISBNs
978-3-31-910294-8, 978-3-31-910295-5
Authors

Nojiri, Kazuo

X Demographics

X Demographics

The data shown below were collected from the profile of 1 X user who shared this research output. Click here to find out more about how the information was compiled.
Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 310 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
Portugal 1 <1%
Belgium 1 <1%
Denmark 1 <1%
China 1 <1%
Spain 1 <1%
Unknown 305 98%

Demographic breakdown

Readers by professional status Count As %
Student > Ph. D. Student 77 25%
Student > Master 53 17%
Researcher 39 13%
Student > Bachelor 35 11%
Student > Doctoral Student 16 5%
Other 21 7%
Unknown 69 22%
Readers by discipline Count As %
Engineering 85 27%
Physics and Astronomy 55 18%
Materials Science 55 18%
Chemistry 15 5%
Chemical Engineering 8 3%
Other 17 5%
Unknown 75 24%