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Mendeley readers
| Chapter title |
Mechanism of Dry Etching
|
|---|---|
| Chapter number | 2 |
| Book title |
Dry Etching Technology for Semiconductors
|
| Published by |
Springer, Cham, January 2015
|
| DOI | 10.1007/978-3-319-10295-5_2 |
| Book ISBNs |
978-3-31-910294-8, 978-3-31-910295-5
|
| Authors |
Kazuo Nojiri, Nojiri, Kazuo |
Mendeley readers
The data shown below were compiled from readership statistics for 32 Mendeley readers of this research output. Click here to see the associated Mendeley record.
Geographical breakdown
| Country | Count | As % |
|---|---|---|
| Unknown | 32 | 100% |
Demographic breakdown
| Readers by professional status | Count | As % |
|---|---|---|
| Student > Ph. D. Student | 12 | 38% |
| Student > Master | 6 | 19% |
| Student > Bachelor | 3 | 9% |
| Researcher | 2 | 6% |
| Lecturer > Senior Lecturer | 1 | 3% |
| Other | 2 | 6% |
| Unknown | 6 | 19% |
| Readers by discipline | Count | As % |
|---|---|---|
| Engineering | 10 | 31% |
| Materials Science | 8 | 25% |
| Physics and Astronomy | 5 | 16% |
| Chemistry | 2 | 6% |
| Unknown | 7 | 22% |