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Chapter title |
Integrated Vacuum Microsensor Systems in CMOS Technology
|
---|---|
Chapter number | 10 |
Book title |
Micro Electro Mechanical Systems
|
Published by |
Springer Singapore, January 2017
|
DOI | 10.1007/978-981-10-2798-7_10-1 |
Book ISBNs |
978-9-81-102798-7
|
Authors |
Jiaqi Wang, Zhenan Tang |
Editors |
Qing-An Huang |