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Timeline
Chapter title |
Fracture Properties of MEMS/NEMS Thin Films
|
---|---|
Chapter number | 8 |
Book title |
Micro Electro Mechanical Systems
|
Published by |
Springer Singapore, January 2017
|
DOI | 10.1007/978-981-10-2798-7_8-1 |
Book ISBNs |
978-9-81-102798-7
|
Authors |
Jinling Yang, Quan Yuan |
Editors |
Qing-An Huang |