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Chapter title |
Silicon Based Optical Sensor: Uncooled Infrared Focal Plane Array Based on Bi-Materials Cantilever Microstructures
|
---|---|
Chapter number | 37 |
Book title |
Micro Electro Mechanical Systems
|
Published by |
Springer, Singapore, January 2018
|
DOI | 10.1007/978-981-10-2798-7_37-1 |
Book ISBNs |
978-9-81-102798-7
|
Authors |
Tianchun Ye, Dapeng Chen, Shali Shi, Binbin Jiao, Ye, Tianchun, Chen, Dapeng, Shi, Shali, Jiao, Binbin |