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Timeline
Chapter title |
On-line Test Microstructures of the Mechanical Properties for Micromachined Multilayered Films
|
---|---|
Chapter number | 9 |
Book title |
Micro Electro Mechanical Systems
|
Published by |
Springer Singapore, January 2017
|
DOI | 10.1007/978-981-10-2798-7_9-1 |
Book ISBNs |
978-9-81-102798-7
|
Authors |
Zai-Fa Zhou, Qing-An Huang, Xin-Ge Guo, Yi-Fan Gu |
Editors |
Qing-An Huang |