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Chapter title |
A Micromachined Thermal Wind Sensor
|
---|---|
Chapter number | 18 |
Book title |
Micro Electro Mechanical Systems
|
Published by |
Springer Singapore, January 2017
|
DOI | 10.1007/978-981-10-2798-7_18-1 |
Book ISBNs |
978-9-81-102798-7
|
Authors |
Zhenxiang Yi, Ming Qin, Qing-An Huang |
Editors |
Qing-An Huang |