Materials Fundamentals of Gate Dielectrics

Chapter 1 Materials and Physical Properties of High-K Oxide Films

Chapter 2 Device Principles of High-K Dielectrics

Chapter 3 Thermodynamics of Oxide Systems Relevant to Alternative Gate Dielectrics

Chapter 4 Electronic Structure and Chemical Bonding in High-k Transition Metal and Lanthanide Series Rare Earth Alternative Gate Dielectrics: Applications to Direct Tunneling and Defects at Dielectric Interfaces

Chapter 5 Atomic Structure, Interfaces and Defects of High Dielectric Constant Gate Oxides

Chapter 7 IVb Transition Metal Oxides and Silicates: An Ab Initio Study

Chapter 8 The Interface Phase and Dielectric Physics for Crystalline Oxides on Semiconductors

Chapter 9 Interfacial Properties of Epitaxial Oxide/Semiconductor Systems

Chapter 10 Functional Structures

Chapter 11 Mechanistic Studies of Dielectric Growth on Silicon

Chapter 12 Methodology for Development of High-κ Stacked Gate Dielectrics on III–V Semiconductors