Materials Fundamentals of Gate Dielectrics

Chapter 1 Materials and Physical Properties of High-K Oxide Films

Chapter 2 Device Principles of High-K Dielectrics

Chapter 3 Thermodynamics of Oxide Systems Relevant to Alternative Gate Dielectrics

Chapter 4 Electronic Structure and Chemical Bonding in High-k Transition Metal and Lanthanide Series Rare Earth Alternative Gate Dielectrics: Applications to Direct Tunneling and Defects at Dielectric Interfaces

Chapter 5 Atomic Structure, Interfaces and Defects of High Dielectric Constant Gate Oxides

Chapter 6 Dielectric Properties of Simple and Complex Oxides from First Principles

Chapter 7 IVb Transition Metal Oxides and Silicates: An Ab Initio Study

Chapter 8 The Interface Phase and Dielectric Physics for Crystalline Oxides on Semiconductors

Chapter 10 Functional Structures

Chapter 11 Mechanistic Studies of Dielectric Growth on Silicon

Chapter 12 Methodology for Development of High-κ Stacked Gate Dielectrics on III–V Semiconductors