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Mikrosystemtechnik

Overview of attention for book
Cover of 'Mikrosystemtechnik'

Table of Contents

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    Book Overview
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    Chapter 1 Einleitung
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    Chapter 2 Transistoren und Siliziumtechnologie
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    Chapter 3 Der piezoresistive Effekt
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    Chapter 4 Volumenmikromechanik
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    Chapter 5 LIGA-Verfahren
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    Chapter 6 Oberflächenmikromechanik
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    Chapter 7 Reaktives Ionentiefenätzen
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    Chapter 8 Softlithografie
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    Chapter 9 Mikrofluidische Chips und Chip-Labore
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    Chapter 10 Direkte Methoden der Mikrostrukturierung
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    Chapter 11 Mikro-Nano-Integration
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    Chapter 12 Ausblick
Attention for Chapter 4: Volumenmikromechanik
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