You are seeing a free-to-access but limited selection of the activity Altmetric has collected about this research output.
Click here to find out more.
| Chapter title |
Reaktives Ionentiefenätzen
|
|---|---|
| Chapter number | 7 |
| Book title |
Mikrosystemtechnik
|
| Published by |
Springer, Berlin, Heidelberg, January 2016
|
| DOI | 10.1007/978-3-662-49773-9_7 |
| Book ISBNs |
978-3-66-249772-2, 978-3-66-249773-9
|
| Authors |
Stephanus Büttgenbach |