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| Chapter title |
Volumenmikromechanik
|
|---|---|
| Chapter number | 4 |
| Book title |
Mikrosystemtechnik
|
| Published by |
Springer, Berlin, Heidelberg, January 2016
|
| DOI | 10.1007/978-3-662-49773-9_4 |
| Book ISBNs |
978-3-66-249772-2, 978-3-66-249773-9
|
| Authors |
Stephanus Büttgenbach |