↓ Skip to main content
What is this page? Embed badge

Mikrosystemtechnik

Overview of attention for book
Cover of 'Mikrosystemtechnik'

Table of Contents

  1. Altmetric Badge
    Book Overview
  2. Altmetric Badge
    Chapter 1 Einleitung
  3. Altmetric Badge
    Chapter 2 Transistoren und Siliziumtechnologie
  4. Altmetric Badge
    Chapter 3 Der piezoresistive Effekt
  5. Altmetric Badge
    Chapter 4 Volumenmikromechanik
  6. Altmetric Badge
    Chapter 5 LIGA-Verfahren
  7. Altmetric Badge
    Chapter 6 Oberflächenmikromechanik
  8. Altmetric Badge
    Chapter 7 Reaktives Ionentiefenätzen
  9. Altmetric Badge
    Chapter 8 Softlithografie
  10. Altmetric Badge
    Chapter 9 Mikrofluidische Chips und Chip-Labore
  11. Altmetric Badge
    Chapter 10 Direkte Methoden der Mikrostrukturierung
  12. Altmetric Badge
    Chapter 11 Mikro-Nano-Integration
  13. Altmetric Badge
    Chapter 12 Ausblick
Attention for Chapter 11: Mikro-Nano-Integration
Altmetric Badge

Citations

dimensions_citation
5 Dimensions

Readers on

mendeley
6 Mendeley
Summary Dimensions citations
So far, Dimensions has found 5 publications that cite this research output.

5

The most recent citing publications are shown below. View all 5 publications that cite this research output on Dimensions.

This page shows the most recent citations of this research output.

Click here to find out how to access more activity.

This page is provided by Altmetric.