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| Chapter title |
Silicon Technologies for Nanoscale Device Packaging
|
|---|---|
| Chapter number | 8 |
| Book title |
Nanopackaging: From Nanomaterials to the Atomic Scale
|
| Published by |
Springer, Cham, January 2015
|
| DOI | 10.1007/978-3-319-21194-7_8 |
| Book ISBNs |
978-3-31-921193-0, 978-3-31-921194-7
|
| Authors |
Aurélie Thuaire, Gaëlle Le Gac, Guillaume Audoit, François Aussenac, Caroline Rauer, Emmanuel Rolland, Jean-Michel Hartmann, Anne-Marie Charvet, Hubert Moriceau, Pierrette Rivallin, Patrick Reynaud, Severine Cheramy, Nicolas Sillon, Xavier Baillin, Thuaire, Aurélie, Gac, Gaëlle Le, Audoit, Guillaume, Aussenac, François, Rauer, Caroline, Rolland, Emmanuel, Hartmann, Jean-Michel, Charvet, Anne-Marie, Moriceau, Hubert, Rivallin, Pierrette, Reynaud, Patrick, Cheramy, Severine, Sillon, Nicolas, Baillin, Xavier |