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Timeline
Mendeley readers
Chapter title |
Study on Subsurface Damage Generated in Ground Si Wafer
|
---|---|
Chapter number | 54 |
Book title |
Towards Synthesis of Micro-/Nano-systems
|
Published by |
Springer, London
, January 2007
|
DOI | 10.1007/1-84628-559-3_54 |
Book ISBNs |
978-1-84628-558-5, 978-1-84628-559-2
|
Authors |
Bahman Soltani Hosseini, Libo Zhou, Tatsuya Tsuruga, Jun Shimizu, Hiroshi Eda, Sumio Kamiya, Hisao Iwase, Hosseini, Bahman Soltani, Zhou, Libo, Tsuruga, Tatsuya, Shimizu, Jun, Eda, Hiroshi, Kamiya, Sumio, Iwase, Hisao |
Mendeley readers
The data shown below were compiled from readership statistics for 2 Mendeley readers of this research output. Click here to see the associated Mendeley record.
Geographical breakdown
Country | Count | As % |
---|---|---|
Unknown | 2 | 100% |
Demographic breakdown
Readers by professional status | Count | As % |
---|---|---|
Unspecified | 1 | 50% |
Unknown | 1 | 50% |
Readers by discipline | Count | As % |
---|---|---|
Unspecified | 1 | 50% |
Unknown | 1 | 50% |