You are seeing a free-to-access but limited selection of the activity Altmetric has collected about this research output.
Click here to find out more.
Timeline
Mendeley readers
Chapter title |
Development of Ultra Precision Finishing Method for Quartz Crystal Wafer Utilizing Atmospheric Pressure Plasma
|
---|---|
Chapter number | 39 |
Book title |
Towards Synthesis of Micro-/Nano-systems
|
Published by |
Springer, London
, January 2007
|
DOI | 10.1007/1-84628-559-3_39 |
Book ISBNs |
978-1-84628-558-5, 978-1-84628-559-2
|
Authors |
Masafumi Shibahara, Yusuke Yamamoto, Kazuya Yamamura, Yasuhisa Sano, Katsuyoshi Endo, Yuzo Mori, Shibahara, Masafumi, Yamamoto, Yusuke, Yamamura, Kazuya, Sano, Yasuhisa, Endo, Katsuyoshi, Mori, Yuzo |
Mendeley readers
The data shown below were compiled from readership statistics for 1 Mendeley reader of this research output. Click here to see the associated Mendeley record.
Geographical breakdown
Country | Count | As % |
---|---|---|
Unknown | 1 | 100% |
Demographic breakdown
Readers by professional status | Count | As % |
---|---|---|
Student > Postgraduate | 1 | 100% |
Readers by discipline | Count | As % |
---|---|---|
Engineering | 1 | 100% |