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Timeline
Chapter title |
Plasma Etching Based Processes for the Fabrication of Micro Structured Linear Guide
|
---|---|
Chapter number | 37 |
Book title |
Towards Synthesis of Micro-/Nano-systems
|
Published by |
Springer, London
, January 2007
|
DOI | 10.1007/1-84628-559-3_37 |
Book ISBNs |
978-1-84628-558-5, 978-1-84628-559-2
|
Authors |
A. Phataralaoha, S. Büttgenbach, Phataralaoha, A., Büttgenbach, S. |