Initiatives of Precision Engineering at the Beginning of a Millennium
Springer US
Chapter title |
Simulation on High Integrity Surface Generation of φ 300 Si Wafer with Fixedabrasive Solution
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Chapter number | 86 |
Book title |
Initiatives of Precision Engineering at the Beginning of a Millennium
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Published by |
Springer, Boston, MA, January 2002
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DOI | 10.1007/0-306-47000-4_86 |
Book ISBNs |
978-0-7923-7414-5, 978-0-306-47000-4
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Authors |
Katsuo Sagawa, Hiroshi Eda, Libo Zhou, Jun Shimizu, Sagawa, Katsuo, Eda, Hiroshi, Zhou, Libo, Shimizu, Jun |