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Mendeley readers
Chapter title |
Development of X-ray Stepper With High Overlay Accuracy for 100-Nm LSI Lithography
|
---|---|
Chapter number | 118 |
Book title |
Initiatives of Precision Engineering at the Beginning of a Millennium
|
Published by |
Springer, Boston, MA, January 2002
|
DOI | 10.1007/0-306-47000-4_118 |
Book ISBNs |
978-0-7923-7414-5, 978-0-306-47000-4
|
Authors |
M. Fukuda, H. Morita, T. Haga, M. Suzuki, H. Tsuyuzaki, A. Shibayama, S. Ishihara, H. Aoyama, S. Mitsui, T. Taguchi, Y. Matsui |
Mendeley readers
The data shown below were compiled from readership statistics for 1 Mendeley reader of this research output. Click here to see the associated Mendeley record.
Geographical breakdown
Country | Count | As % |
---|---|---|
Unknown | 1 | 100% |
Demographic breakdown
Readers by professional status | Count | As % |
---|---|---|
Student > Ph. D. Student | 1 | 100% |
Readers by discipline | Count | As % |
---|---|---|
Psychology | 1 | 100% |