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Chapter title |
Development of a new measurement system for straightness error by a heterodyne interferometer with a grating
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Chapter number | 157 |
Book title |
Initiatives of Precision Engineering at the Beginning of a Millennium
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Published by |
Springer, Boston, MA, January 2002
|
DOI | 10.1007/0-306-47000-4_157 |
Book ISBNs |
978-0-7923-7414-5, 978-0-306-47000-4
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Authors |
Shin Asano, Takayuki Goto, Hisashi Tanimura, Kimiyuki Mitsui, Asano, Shin, Goto, Takayuki, Tanimura, Hisashi, Mitsui, Kimiyuki |