Initiatives of Precision Engineering at the Beginning of a Millennium
Springer US
Chapter title |
Development of Calibration Equipment Using Laser Interferometer Combining a Variable Length Vacuum Cell
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Chapter number | 146 |
Book title |
Initiatives of Precision Engineering at the Beginning of a Millennium
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Published by |
Springer, Boston, MA, January 2002
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DOI | 10.1007/0-306-47000-4_146 |
Book ISBNs |
978-0-7923-7414-5, 978-0-306-47000-4
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Authors |
Hidekazu Oozeki, Shingo Kiyotani, Motonori Ogihara, Oozeki, Hidekazu, Kiyotani, Shingo, Ogihara, Motonori |