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| Chapter title |
Monolithisch integrierte Mikrosysteme
|
|---|---|
| Chapter number | 5 |
| Book title |
Mikrosystemtechnik
|
| Published by |
Teubner, January 2006
|
| DOI | 10.1007/978-3-8351-9022-1_5 |
| Book ISBNs |
978-3-83-510003-9, 978-3-83-519022-1
|