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Chapter title |
Basisprozesse der Mikrosystemtechnik
|
---|---|
Chapter number | 3 |
Book title |
Mikrosystemtechnik
|
Published by |
Teubner, January 2006
|
DOI | 10.1007/978-3-8351-9022-1_3 |
Book ISBNs |
978-3-83-510003-9, 978-3-83-519022-1
|