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Chapter title |
Temperature Measurement of Silicon Wafers Using Photoacoustic Techniques
|
---|---|
Chapter number | 141 |
Book title |
Review of Progress in Quantitative Nondestructive Evaluation
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Published by |
Springer, Boston, MA, January 1990
|
DOI | 10.1007/978-1-4684-5772-8_141 |
Book ISBNs |
978-1-4684-5774-2, 978-1-4684-5772-8
|
Authors |
Y. J. Lee, C. H. Chou, B. T. Khuri-Yakub, K. Saraswat, M. Moslehi, Lee, Y. J., Chou, C. H., Khuri-Yakub, B. T., Saraswat, K., Moslehi, M. |