Encyclopedia of Microfluidics and Nanofluidics
Springer US
Chapter title |
Plasma Etching
|
---|---|
Chapter number | 1251 |
Book title |
Encyclopedia of Microfluidics and Nanofluidics
|
Published by |
Springer, Boston, MA, January 2014
|
DOI | 10.1007/978-3-642-27758-0_1251-5 |
Book ISBNs |
978-3-64-227758-0
|
Authors |
Chen-Kuei Chung, Chung, Chen-Kuei |
Country | Count | As % |
---|---|---|
Unknown | 3 | 100% |
Readers by professional status | Count | As % |
---|---|---|
Student > Bachelor | 1 | 33% |
Unknown | 2 | 67% |
Readers by discipline | Count | As % |
---|---|---|
Chemistry | 1 | 33% |
Unknown | 2 | 67% |